What are the main uses of semiconductor duct spraying ECTFE
Source：
fxbcz.cn Release date： 2025年02月24日
Information summary：Semiconductor duct spraying ECTFE has the following main uses:
1. Corrosion prevention: During the semiconductor manufacturing process, a large amount of corrosive chemicals are used, such as strong acids such as sulfuric acid, hydrofluoric acid, nitric acid, as well as strong bases such as sodium hydroxide and potassium hydroxide. ECTFE has good chemical resistance, which can resist the erosion
Semiconductor duct spraying ECTFE has the following main uses:
1. Corrosion prevention: During the semiconductor manufacturing process, a large amount of corrosive chemicals are used, such as strong acids such as sulfuric acid, hydrofluoric acid, nitric acid, as well as strong bases such as sodium hydroxide and potassium hydroxide. ECTFE has good chemical resistance, which can resist the erosion of these chemicals, protect the air duct from corrosion, extend the service life of the air duct, and ensure stable operation of the air duct in harsh chemical environments.
2. Maintain cleanliness: Semiconductor production has relatively high requirements for environmental cleanliness. The surface of ECTFE coating is smooth and not prone to dust, particles, and chemical deposits, which can reduce the accumulation of impurities in the air duct, help maintain the cleanliness of the air inside the duct, prevent impurities from entering the semiconductor production process, avoid pollution to semiconductor products, and ensure product quality.
3. Ensure gas transmission stability: ECTFE has good sealing and low permeability, which can effectively prevent process gas leakage inside the air duct, as well as prevent external air and impurities from entering the air duct, ensuring the stability and purity of the gas during transmission, and meeting the strict requirements of semiconductor processes for gas transmission. For example, in chemical vapor deposition (CVD), physical vapor deposition (PVD) and other processes, correct control of gas transmission and purity is crucial.
4. Anti static: In the semiconductor manufacturing environment, static electricity may cause damage to semiconductor devices. ECTFE has certain anti-static properties, which can reduce the generation and accumulation of static electricity on the surface of air ducts, reduce the potential harm of static electricity to semiconductor products and production equipment, and improve the safety and reliability of the production process.
5. High temperature resistance: Some processes in semiconductor production can generate high temperatures, and ECTFE can maintain stable performance in a certain high-temperature environment. It can generally work continuously at 150 ℃ and can withstand the high temperatures that may occur inside the air duct. It will not deform, damage or release harmful substances due to high temperatures, ensuring the normal operation of the air duct under high temperature conditions.
6. Insulation: ECTFE is a high insulation material that can prevent electrical accidents caused by static electricity or electric fields generated by electrical equipment during the operation of air ducts, providing protection for the electrical safety of semiconductor production workshops. It can also prevent electrical interference between air ducts and other live equipment, ensuring the normal operation of production equipment.
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